Comment pquest SNF 2009-08-24 15:36:18: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 24 15:36:18 PDT 2009


Backside He cooling is OK now after adjusting the clamp anti-tilt mechanism (wedge).   Helium flow rate was about 3.2 sccm ( slowly drifted to about 1.6 sccm 3 minutes into the process.  Heater is OK.  
RF is not OK.  Ran Oxygen recipe with no problems but when Jim K ran the Oxygen3 recipe (100 W), the bias dropped to -3 V.  Opened the chamber; found the electrode is shorted to ground.




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