Problem pquest SNF 2009-08-27 09:15:59: Wafer was broken in the chamber

dlee76 at snf.stanford.edu dlee76 at snf.stanford.edu
Thu Aug 27 09:15:59 PDT 2009


During the test process and oxygen 3 process, my wafer seems to be broken and I could not unload my wafer from main chamber.




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