Problem pquest SNF 2009-08-27 09:15:59: Wafer was broken in the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 27 11:16:59 PDT 2009


Removed the broken wafer.  Adjusted the clamp level.  Ran O2 plasma.  Backside He cooling flow is now around 3 sccm.




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