Comment pquest SNF 2009-08-28 11:34:41: Ready7 for Jim Kruger usage ....

shott at snf.stanford.edu shott at snf.stanford.edu
Fri Aug 28 11:34:42 PDT 2009


pquest has been restarted.  I began to run oxygen3 (well, didn't get it started) when I found that Jim Kruger's wafer is in the chamber.  As a result, I didn't fire the plasma but believe that everything else is functional and am releasing the tool for Jim Kruger's usage.
I'm goijng to reserve the tool in his name so that nobody disturbs his loaded wafer.
Thanks,
John




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