Problem pquest SNF 2009-08-29 15:07:48: wafer not positioned in holder

carterlin at snf.stanford.edu carterlin at snf.stanford.edu
Sat Aug 29 15:07:48 PDT 2009


wafers were not unloaded in the holer during unload. They were put closer to the head of the arm, away from the flat edges with a gap of about 1cm. Checked unload process from the side windows with flashlight. Looked fine. Maybe the loading arm didn't reach far enough, but couldn't tell.




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