From yiyang at snf.stanford.edu Sun Dec 6 20:31:15 2009 From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu) Date: Sun, 6 Dec 2009 20:31:15 -0800 Subject: Problem pquest SNF 2009-12-06 20:31:15: process pump error on main screen Message-ID: but chamber at 2mtorr after system reset From cbaxter at snf.stanford.edu Tue Dec 8 01:10:16 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Dec 2009 01:10:16 -0800 Subject: Problem pquest SNF 2009-12-06 20:31:15: process pump error on main screen Message-ID: Reset pc and cleared the alarm. From jimkruger at snf.stanford.edu Wed Dec 9 16:40:52 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 9 Dec 2009 16:40:52 -0800 Subject: Shutdown pquest SNF 2009-12-09 16:40:52: Load Lock pump quit? Message-ID: System will not pump load lock. I did disable / re-enable with no positive effect. From eenriquez at snf.stanford.edu Wed Dec 9 18:33:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Dec 2009 18:33:10 -0800 Subject: Comment pquest SNF 2009-12-09 18:33:10: Update load lock pump Message-ID: Load lock pump needs to be replaced. Will replace pump tomorrow From cbaxter at snf.stanford.edu Wed Dec 9 22:10:59 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 9 Dec 2009 22:10:59 -0800 Subject: Comment pquest SNF 2009-12-09 22:10:59: Bad pump Message-ID: Load lock bad pump is removed from the rack and drained oil. From eenriquez at snf.stanford.edu Thu Dec 10 10:32:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Dec 2009 10:32:03 -0800 Subject: Shutdown pquest SNF 2009-12-09 16:40:52: Load Lock pump quit? Message-ID: Replaced LL pump. Cycled a wafer and ran an O2 plasma. From eenriquez at snf.stanford.edu Thu Dec 10 10:32:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Dec 2009 10:32:11 -0800 Subject: Comment pquest SNF 2009-12-09 18:33:10: Update load lock pump Message-ID: Archived From eenriquez at snf.stanford.edu Thu Dec 10 10:32:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Dec 2009 10:32:18 -0800 Subject: Comment pquest SNF 2009-12-09 22:10:59: Bad pump Message-ID: Archived From king at snf.stanford.edu Fri Dec 11 03:16:12 2009 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 11 Dec 2009 03:16:12 -0800 Subject: Problem pquest SNF 2009-12-11 03:16:11: Pump error msg during Idle Mode Message-ID: The turbo looks OK. From eenriquez at snf.stanford.edu Fri Dec 11 14:19:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Dec 2009 14:19:55 -0800 Subject: Comment pquest SNF 2009-12-11 14:19:54: Maintenance activity Message-ID: Replaced leaky vacuum pump exhaust bellows. Ran O2 clean. From cbaxter at snf.stanford.edu Tue Dec 22 08:37:37 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 22 Dec 2009 08:37:37 -0800 Subject: Problem pquest SNF 2009-12-11 03:16:11: Pump error msg during Idle Mode Message-ID: