From eenriquez at snf.stanford.edu Mon Feb 2 11:18:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Feb 2009 11:18:47 -0800 Subject: Comment pquest SNF 2009-02-02 11:18:46: Completed wet clean Message-ID: Found two out of the four clamp springs wee slightly compressed. Replaced all four springs. Ran O2 plasma and cycled a wafer. From jimkruger at snf.stanford.edu Tue Feb 3 16:00:01 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 3 Feb 2009 16:00:01 -0800 Subject: Problem pquest SNF 2009-02-03 16:00:01: Slow water leak Message-ID: It looks like it is the packing of the "gas to liquid" valve in the cooling circuit. Still running with beaker and wipes to catch the drip. From eenriquez at snf.stanford.edu Thu Feb 5 08:59:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Feb 2009 08:59:29 -0800 Subject: Comment pquest SNF 2009-01-23 15:04:52: PQuest looks OK again Message-ID: Archived From emyers at snf.stanford.edu Sat Feb 7 07:14:44 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 7 Feb 2009 07:14:44 -0800 Subject: Problem pquest SNF 2009-02-07 07:14:44: No HBr Message-ID: Due to a fault in the gas bunker, HBr has been turned off. From shott at snf.stanford.edu Mon Feb 9 15:14:17 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 9 Feb 2009 15:14:17 -0800 Subject: Problem pquest SNF 2009-02-07 07:14:44: No HBr Message-ID: Clearing this ... to my knowledge, this tool does not utilize HBr. We need to clean up our database of which tools use which gases and then make sure that it matches what is stored in the "uses" and "requires" tables. John From jimkruger at snf.stanford.edu Tue Feb 10 17:30:30 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 10 Feb 2009 17:30:30 -0800 Subject: Problem pquest SNF 2009-02-10 17:30:30: Broken wafer Message-ID: Operator error (jk) John Shott may find time to remove it From shott at snf.stanford.edu Tue Feb 10 19:14:17 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 10 Feb 2009 19:14:17 -0800 Subject: Problem pquest SNF 2009-02-10 17:30:30: Broken wafer Message-ID: Cleared broken wafer. Jim Kruger did some chamber seasoning following the opening of the system. Replaced magnet on front door latch. Replace bulbs in Ready/Remote switch on microwave generator with 382 bulbs (14V, 80 mA). During venting turbo current increased from 1.85A to 2.20A and foreline pressure increased to about 60 mTorr so the gate valve seems to be holding in the closed position pretty well even if there is atmospheric pressure pushing against it. John From shott at snf.stanford.edu Wed Feb 11 07:02:55 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 11 Feb 2009 07:02:55 -0800 Subject: Problem pquest SNF 2009-01-30 15:37:37: Screen lock-up Message-ID: Jim Kruger reported that the screen lock-up problem was resolved by a reboot. THere has apparently been no observerd problem since that time so we will clear this ... but keep an eye on it.John From shott at snf.stanford.edu Wed Feb 11 07:04:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 11 Feb 2009 07:04:54 -0800 Subject: Problem pquest SNF 2009-02-03 16:00:01: Slow water leak Message-ID: While there was a bit of glycol/water found near the little chiller, there has been no addiitonal leakage observed since the original report and we have been unable to re-create a leakage situiation. So, we will clear this problem report, but keep an eye on the chiller and tubing for any future signs of leakage. John From eenriquez at snf.stanford.edu Tue Feb 17 13:39:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Feb 2009 13:39:13 -0800 Subject: Comment pquest SNF 2009-02-02 11:18:46: Completed wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Tue Feb 17 13:39:53 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Feb 2009 13:39:53 -0800 Subject: Comment pquest SNF 2009-02-17 13:39:52: Completed wet clean Message-ID: From arkam at snf.stanford.edu Wed Feb 25 18:05:01 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Wed, 25 Feb 2009 18:05:01 -0800 Subject: Shutdown pquest SNF 2009-02-25 18:05:01: the keyboard is not working..wafer is stuck inside Message-ID: I loaded my wafer...and then the Keyboard stopped working. I was signed out and whenever I am trying to give passwords, before I eneter anything it is saying incorrect password..also I could not change the step processing time as the keyboard is not working From arkam at snf.stanford.edu Wed Feb 25 18:29:25 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Wed, 25 Feb 2009 18:29:25 -0800 Subject: Shutdown pquest SNF 2009-02-25 18:29:25: Message-ID: From cbaxter at snf.stanford.edu Wed Feb 25 19:03:29 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 25 Feb 2009 19:03:29 -0800 Subject: Shutdown pquest SNF 2009-02-25 18:29:25: Message-ID: From cbaxter at snf.stanford.edu Wed Feb 25 19:06:03 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 25 Feb 2009 19:06:03 -0800 Subject: Shutdown pquest SNF 2009-02-25 18:05:01: the keyboard is not working..wafer is stuck inside Message-ID: The touch screen was not responding, had to reset the touch screen and was able to login and out. Possible touch screen is going bad and also touch screen does not go to stand by mode. From arkam at snf.stanford.edu Wed Feb 25 19:47:17 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Wed, 25 Feb 2009 19:47:17 -0800 Subject: Problem pquest SNF 2009-02-25 19:47:17: Cannot do LL to atm Message-ID: when I am pressing LL to atom--it is not working-- though the keyboard is working From arkam at snf.stanford.edu Wed Feb 25 19:54:17 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Wed, 25 Feb 2009 19:54:17 -0800 Subject: Problem pquest SNF 2009-02-25 19:54:17: also unloading is not working Message-ID: I pressed unload--and it asked me whether I want to unload the wafer--but the presusre did not go down for 30 mins.. From arkam at snf.stanford.edu Wed Feb 25 20:00:33 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Wed, 25 Feb 2009 20:00:33 -0800 Subject: Problem pquest SNF 2009-02-25 20:00:33: The sleep mode page is not coming Message-ID: The black screen is not coming-- It starts to load and then I see the page showing edit recipe and so on. From cbaxter at snf.stanford.edu Wed Feb 25 20:15:05 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 25 Feb 2009 20:15:05 -0800 Subject: Problem pquest SNF 2009-02-25 20:00:33: The sleep mode page is not coming Message-ID: From cbaxter at snf.stanford.edu Wed Feb 25 20:15:38 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 25 Feb 2009 20:15:38 -0800 Subject: Problem pquest SNF 2009-02-25 19:54:17: also unloading is not working Message-ID: Re-boot system and unload wafer at auto mode. From cbaxter at snf.stanford.edu Wed Feb 25 20:16:10 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 25 Feb 2009 20:16:10 -0800 Subject: Problem pquest SNF 2009-02-25 19:47:17: Cannot do LL to atm Message-ID: PC locked up, re-boot system..