Comment pquest SNF 2009-02-02 11:18:46: Completed wet clean

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Feb 2 11:18:47 PST 2009


Found two out of the four clamp springs wee slightly compressed.  Replaced all four springs.
Ran O2 plasma and cycled a wafer.




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