Problem pquest SNF 2008-11-04 10:04:43: large variations in DC bias during etching

shott at snf.stanford.edu shott at snf.stanford.edu
Tue Jan 6 07:45:44 PST 2009


Electrically isolated the clamp assembly from the lower "fork" in the belief that we will get better/higher bias with a floating clamp.  This was based on suggestions by Jim McVittie and Jim Kruger and Elmer found the teflon/kapton/quartz insulating parts and performed the work.
John




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