Problem pquest SNF 2009-01-06 20:17:49: Chuck heater not working

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue Jan 6 20:17:50 PST 2009


Use "Auto" on the temp controller.  I found it in "Manual".
The "L1" light flashes when the Temp is below set point as expected, but no evidence of heating.  Perhaps the heater elements have burned out.
The work-around is to set about  2 degrees less than the chuck Temperature you want on the Chiller.  Higher power etches will need a larger delta.




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