Problem pquest SNF 2009-01-18 00:07:41: Wafer is stuck in the chamber

wanki at snf.stanford.edu wanki at snf.stanford.edu
Sun Jan 18 00:07:42 PST 2009


One pure Si wafer is stuck in the chamber.
I guess it seemed to be stuck during loading or unloading wafer in the chamber.




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