Problem pquest SNF 2009-01-20 15:49:20: wafer dropped on chuck during unload

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue Jan 20 15:49:21 PST 2009


During "Oxygen" clean after wet clean.
Test Wafer still in system.
System stalled "waiting for clamp up".
I hit "escape". then "system reset".




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