Problem pquest SNF 2009-01-20 15:49:20: wafer dropped on chuck during unload

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Jan 20 23:08:26 PST 2009


Removed wafer from chamber. Manually cycle load wafer
into the chamber and noticed wafer was misloading on the
7 o'clock pin position I loosen the two screws on that hold
the arm down and moved the arm to the left as far as it will
let me and cycled load/unload on semiauto mode. 
I run clean recipe#1 and wafer load and unload fine.




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