Comment pquest SNF 2009-01-21 09:36:39: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 21 09:36:39 PST 2009


Ran a wafer using the Oxygen3 recipe.  Backside He flow rate @ 10 Torr = 4.2 sccm.  Bias voltage (step 3) = -104 volts.




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