Comment pquest SNF 2009-01-21 17:48:30: O-ring re-installed (by John Shott). System OK
jimkruger at snf.stanford.edu
jimkruger at snf.stanford.edu
Wed Jan 21 17:48:31 PST 2009
Perhaps watch load / unload carefully fro a while.
He seal "perfect" = 3.0 sccm, eve on standard thickness wafers.
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