Shutdown pquest SNF 2009-01-22 01:11:00: Wafer is stuck in the chamber

wanki at snf.stanford.edu wanki at snf.stanford.edu
Thu Jan 22 01:11:01 PST 2009


My wafer was broken during the unloading process and the broken part is stuck in the chamber. I guess that the loading/unloading has some critical mechanical problems.




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