Shutdown pquest SNF 2009-01-22 20:41:53: wafer broke inside chamber during unloading

[eenriquez at snf.stanford.edu]

Removed broken wafer and cleaned the chuck.  Replaced the backside He cooling o-ring with a smaller o-ring ( from 151 to 148).  Ran an O2 plasma.  Jim cycled many wafers with no problems.