Shutdown pquest SNF 2009-01-22 20:41:53: wafer broke inside chamber during unloading

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 23 15:04:50 PST 2009


Removed broken wafer and cleaned the chuck.  Replaced the backside He cooling o-ring with a smaller o-ring ( from 151 to 148).  Ran an O2 plasma.  Jim cycled many wafers with no problems.




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