January 2009 Archives by date

Messages sorted by: [ thread ] [ subject ] [ author ]
More info on this list...

Starting: Tue Jan 6 07:45:44 PST 2009
Ending: Fri Jan 30 15:37:37 PST 2009
Messages: 65

Problem pquest SNF 2008-11-04 10:04:43: large variations in DC bias during etching shott at snf.stanford.edu
Problem pquest SNF 2008-11-06 10:55:41: DC bias low shott at snf.stanford.edu
Comment pquest SNF 2008-10-29 18:25:53: DC Bias Low shott at snf.stanford.edu
Comment pquest SNF 2008-11-03 11:58:22: Replaced clamp springs shott at snf.stanford.edu
Comment pquest SNF 2008-11-17 10:04:21: Wet clean completed shott at snf.stanford.edu
Comment pquest SNF 2008-11-18 00:09:51: no more logsheets shott at snf.stanford.edu
Comment pquest SNF 2008-11-24 12:48:42: DC bias low shott at snf.stanford.edu
Comment pquest SNF 2008-12-04 06:44:01: 5 finger clamp installed shott at snf.stanford.edu
Comment pquest SNF 2008-12-15 14:27:42: Completed wet clean shott at snf.stanford.edu
Comment pquest SNF 2007-10-15 10:50:29: wet clean shott at snf.stanford.edu
Comment pquest SNF 2007-10-25 10:51:31: PQuest up shott at snf.stanford.edu
Comment pquest SNF 2007-11-07 06:46:13: Program stopped suddenly shott at snf.stanford.edu
Comment pquest SNF 2007-11-08 09:03:39: Large Vibration shott at snf.stanford.edu
Comment pquest SNF 2007-11-13 16:21:29: re: odd etch results shott at snf.stanford.edu
Comment pquest SNF 2007-12-05 15:45:00: strange etch results shott at snf.stanford.edu
Comment pquest SNF 2008-01-15 20:27:07: flashlight shott at snf.stanford.edu
Comment pquest SNF 2008-01-17 13:45:33: New Reservation Limit on pquest shott at snf.stanford.edu
Problem pquest SNF 2008-05-23 15:16:40: rf autotune shott at snf.stanford.edu
Comment pquest SNF 2008-05-31 14:50:17: rf tuning problem shott at snf.stanford.edu
Problem pquest SNF 2008-06-03 20:32:26: MW power dropped during pre-etch shott at snf.stanford.edu
Comment pquest SNF 2008-06-05 18:38:18: Microwave Power control shott at snf.stanford.edu
Comment pquest SNF 2008-06-05 20:19:06: Microwave power supply pot shott at snf.stanford.edu
Problem pquest SNF 2008-06-07 09:39:41: Depositoin on Viewports shott at snf.stanford.edu
Problem pquest SNF 2008-06-10 09:08:55: could not reach max microwave power shott at snf.stanford.edu
Problem pquest SNF 2008-08-21 13:21:55: minor glitches shott at snf.stanford.edu
Problem pquest SNF 2008-09-08 22:33:12: high temp RF problem shott at snf.stanford.edu
Problem pquest SNF 2008-09-08 22:37:09: wafer still popping on unload shott at snf.stanford.edu
Problem pquest SNF 2008-09-10 11:51:44: run 100C chuck temp observed very low RF bias shott at snf.stanford.edu
Comment pquest SNF 2008-09-24 17:42:49: Gas cooling for High Temp use is OFF shott at snf.stanford.edu
Comment pquest SNF 2009-01-06 08:52:53: Insulated the clamp ring eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-06 20:10:38: Bias voltage now reads about 42% higher after clamp isolation jimkruger at snf.stanford.edu
Problem pquest SNF 2009-01-06 20:17:49: Chuck heater not working jimkruger at snf.stanford.edu
Comment pquest SNF 2009-01-12 16:00:22: out of logbook sheets, writing in logbook krivoire at snf.stanford.edu
Shutdown pquest SNF 2009-01-15 23:28:41: sdogbe at snf.stanford.edu
Shutdown pquest SNF 2009-01-15 23:28:41: eenriquez at snf.stanford.edu
Problem pquest SNF 2009-01-18 00:07:41: Wafer is stuck in the chamber wanki at snf.stanford.edu
Shutdown pquest SNF 2009-01-18 12:40:43: Si wafer stuck in the Pquest chamber faraon at snf.stanford.edu
Comment pquest SNF 2009-01-20 14:58:46: Update eenriquez at snf.stanford.edu
Problem pquest SNF 2009-01-20 15:49:20: wafer dropped on chuck during unload jimkruger at snf.stanford.edu
Shutdown pquest SNF 2009-01-18 12:40:43: Si wafer stuck in the Pquest chamber cbaxter at snf.stanford.edu
Problem pquest SNF 2009-01-20 15:49:20: wafer dropped on chuck during unload cbaxter at snf.stanford.edu
Problem pquest SNF 2009-01-18 00:07:41: Wafer is stuck in the chamber cbaxter at snf.stanford.edu
Comment pquest SNF 2009-01-20 14:58:46: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-21 09:36:39: Update eenriquez at snf.stanford.edu
Problem pquest SNF 2009-01-21 15:20:53: Oring popped out of groove. System down jimkruger at snf.stanford.edu
Problem pquest SNF 2009-01-21 15:20:53: Oring popped out of groove. System down shott at snf.stanford.edu
Comment pquest SNF 2009-01-21 17:48:30: O-ring re-installed (by John Shott). System OK jimkruger at snf.stanford.edu
Shutdown pquest SNF 2009-01-22 01:11:00: Wafer is stuck in the chamber wanki at snf.stanford.edu
Shutdown pquest SNF 2009-01-22 01:11:00: Wafer is stuck in the chamber shott at snf.stanford.edu
Shutdown pquest SNF 2009-01-22 20:41:53: wafer broke inside chamber during unloading faraon at snf.stanford.edu
Shutdown pquest SNF 2009-01-22 20:41:53: wafer broke inside chamber during unloading eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-23 15:04:52: PQuest looks OK again jimkruger at snf.stanford.edu
Problem pquest SNF 2009-01-06 20:17:49: Chuck heater not working eenriquez at snf.stanford.edu
Shutdown pquest SNF 2009-01-28 11:54:51: System was stopped during wafer loading. jswi at snf.stanford.edu
Shutdown pquest SNF 2009-01-28 11:54:51: System was stopped during wafer loading. maurice at snf.stanford.edu
Problem pquest SNF 2009-01-28 14:58:49: "clamp up" sensor sometimes fails jimkruger at snf.stanford.edu
Comment pquest SNF 2009-01-28 18:08:32: Update eenriquez at snf.stanford.edu
Problem pquest SNF 2009-01-28 14:58:49: "clamp up" sensor sometimes fails eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-28 18:08:32: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-21 17:48:30: O-ring re-installed (by John Shott). System OK eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-21 09:36:39: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-06 20:10:38: Bias voltage now reads about 42% higher after clamp isolation eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-06 08:52:53: Insulated the clamp ring eenriquez at snf.stanford.edu
Comment pquest SNF 2009-01-12 16:00:22: out of logbook sheets, writing in logbook eenriquez at snf.stanford.edu
Problem pquest SNF 2009-01-30 15:37:37: Screen lock-up jimkruger at snf.stanford.edu

Last message date: Fri Jan 30 15:37:37 PST 2009
Archived on: Fri Jan 11 13:09:50 PST 2013

Messages sorted by: [ thread ] [ subject ] [ author ]
More info on this list...

This archive was generated by Pipermail 0.09 (Mailman edition).