Shutdown pquest SNF 2009-07-30 18:51:09: Broken wafer in system

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Jul 30 20:21:50 PDT 2009


Vented chamber and vacuum broken wafer chip.
Also, wet cleaned chamber with ipa and water..
Run 30 mins of o2 plasma.




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