Shutdown pquest SNF 2009-07-31 11:10:39: another broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 31 14:54:56 PDT 2009


Cleaned up the chamber and loadlock.   Ran O2 plasma, He leak rate was 4.9 sccm.  Cycled wafer in and out with no problems.




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