Shutdown pquest SNF 2009-07-31 20:27:35: wafer broken inside

mzhang2 at snf.stanford.edu mzhang2 at snf.stanford.edu
Fri Jul 31 20:27:36 PDT 2009


after etching, when I tried to get my wafer, it just broke into large pieces and some of the pieces still remained in the chamber




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