From eenriquez at snf.stanford.edu Mon Jun 1 12:36:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:36:39 -0700 Subject: Shutdown pquest SNF 2009-05-07 16:46:29: RF system still not working Message-ID: RF now working. Ran O2 plasma. He flow at 10T is 7.2 sccm. Cycled wafer in out of the system several times. From eenriquez at snf.stanford.edu Mon Jun 1 12:37:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:04 -0700 Subject: Comment pquest SNF 2009-05-29 14:59:50: Update Message-ID: RF now working. Ran O2 plasma. He flow at 10T is 7.2 sccm. Cycled wafer in out of the system several times. From eenriquez at snf.stanford.edu Mon Jun 1 12:37:09 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:09 -0700 Subject: Comment pquest SNF 2009-05-28 20:35:08: Update Message-ID: RF now working. Ran O2 plasma. He flow at 10T is 7.2 sccm. Cycled wafer in out of the system several times. From eenriquez at snf.stanford.edu Mon Jun 1 12:37:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:13 -0700 Subject: Comment pquest SNF 2009-05-28 19:41:04: Update Message-ID: RF now working. Ran O2 plasma. He flow at 10T is 7.2 sccm. Cycled wafer in out of the system several times. From eenriquez at snf.stanford.edu Mon Jun 1 12:37:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:21 -0700 Subject: Comment pquest SNF 2009-05-28 14:34:23: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:37:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:27 -0700 Subject: Comment pquest SNF 2009-05-26 18:21:06: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:37:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:38 -0700 Subject: Comment pquest SNF 2009-05-26 15:01:42: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:37:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:45 -0700 Subject: Comment pquest SNF 2009-05-26 12:18:16: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:37:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:51 -0700 Subject: Comment pquest SNF 2009-05-20 21:17:02: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:37:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:37:57 -0700 Subject: Comment pquest SNF 2009-05-15 15:07:33: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:38:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:38:03 -0700 Subject: Comment pquest SNF 2009-05-14 19:31:01: Chuck assembly Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:38:11 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:38:11 -0700 Subject: Comment pquest SNF 2009-05-13 18:17:39: Reassembly update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:38:22 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:38:22 -0700 Subject: Comment pquest SNF 2009-05-12 14:49:48: Heater update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:38:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:38:30 -0700 Subject: Problem pquest SNF 2009-05-07 15:12:41: No bias voltage Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:38:37 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:38:37 -0700 Subject: Comment pquest SNF 2009-05-07 15:13:11: No bias voltage Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:38:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:38:50 -0700 Subject: Comment pquest SNF 2009-05-05 18:56:50: PQuest back up Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:38:59 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:38:59 -0700 Subject: Comment pquest SNF 2009-05-01 19:45:35: Backside He leak creeping up Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:39:07 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:39:07 -0700 Subject: Comment pquest SNF 2009-04-20 14:24:01: Completed wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jun 1 12:39:14 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Jun 2009 12:39:14 -0700 Subject: Comment pquest SNF 2009-04-17 04:08:03: Regarding the broken wafer Message-ID: Archived From jimkruger at snf.stanford.edu Wed Jun 3 14:42:56 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 3 Jun 2009 14:42:56 -0700 Subject: Shutdown pquest SNF 2009-06-03 14:42:55: Big Air leak Message-ID: Pink plasma on Oxygen3, step 4. Measured leak up = 60 mTorr/ min.; later = 35 mT/min., so varying? Maybe the gas feed flex line (exhausted so He check harder)? JimK From cbaxter at snf.stanford.edu Wed Jun 3 19:26:49 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 3 Jun 2009 19:26:49 -0700 Subject: Comment pquest SNF 2009-06-03 19:26:49: Chamber leak rate Message-ID: I checked the leak rate is 3mt per min, anyway will hook up the leak detector. From eenriquez at snf.stanford.edu Thu Jun 4 11:54:14 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Jun 2009 11:54:14 -0700 Subject: Shutdown pquest SNF 2009-06-03 14:42:55: Big Air leak Message-ID: Did not find any leaks using the He leak detector. Ran the Oxygen 3 recipe and did not see a pink plasma (plasma was whitish blue). Showed Jim K. The chamber leak-up rate was 3 mT/min. From eenriquez at snf.stanford.edu Thu Jun 4 11:54:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Jun 2009 11:54:21 -0700 Subject: Comment pquest SNF 2009-06-03 19:26:49: Chamber leak rate Message-ID: Archived From arkam at snf.stanford.edu Sat Jun 6 16:20:18 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sat, 6 Jun 2009 16:20:18 -0700 Subject: Problem pquest SNF 2009-06-06 16:20:17: Waiting for clamp sensor for 30 mins Message-ID: I ran oxygen recipe first. Then I left the wafer in the chuck and tried to run my seasoning. BUt it is showing waiting for clamp sensor for 30 mins. Everything else is not responding. My wafer is inside. I am waiting to see if the other buttons start working or not. From arkam at snf.stanford.edu Sat Jun 6 16:36:14 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sat, 6 Jun 2009 16:36:14 -0700 Subject: Shutdown pquest SNF 2009-06-06 16:36:14: clamp down sensor Message-ID: Still waiting for clamp down sensor--the pressure is also slowly increasing. My wafer is inside. The whole machine is not responding. So I am shutting it down. From eenriquez at snf.stanford.edu Mon Jun 8 08:46:56 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 08:46:56 -0700 Subject: Shutdown pquest SNF 2009-06-06 16:36:14: clamp down sensor Message-ID: Adjusted the clamp down sensor position. Cycled clamp many times without a fault. From eenriquez at snf.stanford.edu Mon Jun 8 08:47:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 08:47:03 -0700 Subject: Problem pquest SNF 2009-06-06 16:20:17: Waiting for clamp sensor for 30 mins Message-ID: Adjusted the clamp down sensor position. Cycled clamp many times without a fault. From jimkruger at snf.stanford.edu Mon Jun 8 12:25:17 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 8 Jun 2009 12:25:17 -0700 Subject: Problem pquest SNF 2009-06-08 12:25:16: Variable air leak--only OK for O2 etching Message-ID: I suspect the variable air leak is the ferrofluidic feed-thru for the wafer clamp. I would not use the system for anything except recipes with large O2 flows. BCl3, in particular, is likely to cause a mess. jim From shuluc at snf.stanford.edu Tue Jun 9 22:34:55 2009 From: shuluc at snf.stanford.edu (shuluc at snf.stanford.edu) Date: Tue, 9 Jun 2009 22:34:55 -0700 Subject: Shutdown pquest SNF 2009-06-09 22:34:54: wafer stuck Message-ID: From eenriquez at snf.stanford.edu Wed Jun 10 18:24:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Jun 2009 18:24:33 -0700 Subject: Shutdown pquest SNF 2009-06-09 22:34:54: wafer stuck Message-ID: Recovered the user's wafer. From eenriquez at snf.stanford.edu Wed Jun 10 18:28:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Jun 2009 18:28:45 -0700 Subject: Shutdown pquest SNF 2009-06-10 18:28:45: Leaky feedthrough Message-ID: Ordered a new feedthrough but the lead time is 2 - 3 weeks. Modifying the clamp drive assembly to work with a ferrofluidic feedthrough that we have available. System should be ready by Friday or next Monday. From eenriquez at snf.stanford.edu Thu Jun 11 15:05:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Jun 2009 15:05:49 -0700 Subject: Comment pquest SNF 2009-06-11 15:05:47: Update feedthrough Message-ID: Installed a new feedthrough and ran O2 plasma. Leak rate is about 4 mT/min. Still need to reassemble the modified clamp drive assembly and recalibrate the clamp positions. From cbaxter at snf.stanford.edu Thu Jun 11 16:42:48 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 11 Jun 2009 16:42:48 -0700 Subject: Comment pquest SNF 2009-06-11 16:42:47: Update Message-ID: Jim Haydon still need to modify one of the bracket for the new lifter motor assembly.. From cbaxter at snf.stanford.edu Fri Jun 12 18:35:33 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 12 Jun 2009 18:35:33 -0700 Subject: Shutdown pquest SNF 2009-06-10 18:28:45: Leaky feedthrough Message-ID: Elmer changed feedthrough and completed the clamping mode. Adjusted clamping force, the best backside he leak I can get is 1.4sccm. Also, John Shott repaired the squeaky load arm. From shott at snf.stanford.edu Sat Jun 13 08:37:06 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Jun 2009 08:37:06 -0700 Subject: Problem pquest SNF 2009-06-08 12:25:16: Variable air leak--only OK for O2 etching Message-ID: Elmer, Jim Haydon, and Cesar have replaced the ferrofluidic seal with the equivalent model from Rikagu 10C-11099402 (FD-CF-0250-F) which is a chemically resistant model. This uses a fomblin base for the ferrofluid rather than the normal hydrocarbon base. In the process, Elmer and Jim decided to remove the gear drive and modified brackets for a direct drive approach. This will, hopefully, reduce/remove lateral torque from the feedtrhough and will extend it's life. The up/down motion now drives very silently. In the process of repairing this, the motion of the wafer arm also stopped. This was disassembled and we found that the toothed gear on the threaded drive shaft had loosened to the point that it was only slipping. Also, the connection on the end of the ferrofluidic rotary feedthrough had been "grooved" by slippage of the shaft coupling to the motor drive. Repositioning that shaft coupling, retightening all couplings an pulleys, and re-aligning the chain drive have returned the drive to service with nice, quiet performance. John From shott at snf.stanford.edu Sat Jun 13 08:38:18 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Jun 2009 08:38:18 -0700 Subject: Comment pquest SNF 2009-06-11 15:05:47: Update feedthrough Message-ID: Feedthrough replacement and repairs completed by Elmer, Jim Haydon, and Cesar. John From shott at snf.stanford.edu Sat Jun 13 08:38:42 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 13 Jun 2009 08:38:42 -0700 Subject: Comment pquest SNF 2009-06-11 16:42:47: Update Message-ID: Bracket modification completed. John From mihuhou at snf.stanford.edu Sat Jun 13 11:09:35 2009 From: mihuhou at snf.stanford.edu (mihuhou at snf.stanford.edu) Date: Sat, 13 Jun 2009 11:09:35 -0700 Subject: Problem pquest SNF 2009-06-13 11:09:34: RFOUT Message-ID: When I tried to use OXYGEN3.RCP, RF power couldn't reach the setpoint (50W). Matching system went out of limit. From sdogbe at snf.stanford.edu Sat Jun 13 20:32:29 2009 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Sat, 13 Jun 2009 20:32:29 -0700 Subject: Comment pquest SNF 2009-06-13 20:32:29: Waiting for clampdown sensor Message-ID: System unable to run recipe because of "clamp down sensor" problem. From arkam at snf.stanford.edu Sun Jun 14 11:15:15 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sun, 14 Jun 2009 11:15:15 -0700 Subject: Problem pquest SNF 2009-06-14 11:15:14: RF out and He Message-ID: I also faced RFout problem. Helium without any wafer is 8.5 sccm and with wafer 7 sccm. This is higher than it should be From jimkruger at snf.stanford.edu Sun Jun 14 18:16:58 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 14 Jun 2009 18:16:58 -0700 Subject: Problem pquest SNF 2009-06-14 18:16:57: Update 6-14-09 Message-ID: He still high on std. wafers, better on thicker DP wafers. Found "grease tracks" on the back of my D.P. wafer after unloading. " RF out" seems to occur randomly, some times OK, some times not. From eenriquez at snf.stanford.edu Mon Jun 15 08:49:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Jun 2009 08:49:45 -0700 Subject: Shutdown pquest SNF 2009-06-15 08:49:44: No RF Message-ID: From eenriquez at snf.stanford.edu Tue Jun 16 15:21:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Jun 2009 15:21:36 -0700 Subject: Comment pquest SNF 2009-06-16 15:21:35: Update Message-ID: Adjusted the dark space shield height and centered the clamp. Ran the Oxygen recipe. The bias voltage = -45 v, He cooling flow= 2.3 sccm reflected power= 0 W. The bad news: The clamp mid position is inconsistent. We believe this is caused by the sensor block guide rod having too much slop. Need to tighten up the guide rod. The load arm has disengaged from its drive mechanism. Need to reattach the load arm. From eenriquez at snf.stanford.edu Wed Jun 17 12:13:19 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 12:13:19 -0700 Subject: Shutdown pquest SNF 2009-06-15 08:49:44: No RF Message-ID: Replaced the RF cable and lowered the top dark space shield. From eenriquez at snf.stanford.edu Wed Jun 17 12:14:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 12:14:44 -0700 Subject: Comment pquest SNF 2009-06-16 15:21:35: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 17 12:17:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 12:17:04 -0700 Subject: Problem pquest SNF 2009-06-14 18:16:57: Update 6-14-09 Message-ID: Modified the clamp drive mechanism by converting it to a direct drive insted of belt drive. Adjusted the dark space shield height and centered the clamp. Also replaced the RF cable. Ran the Oxygen recipe. From eenriquez at snf.stanford.edu Wed Jun 17 12:17:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 12:17:12 -0700 Subject: Problem pquest SNF 2009-06-14 11:15:14: RF out and He Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 17 12:17:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 12:17:20 -0700 Subject: Comment pquest SNF 2009-06-13 20:32:29: Waiting for clampdown sensor Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 17 12:17:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Jun 2009 12:17:27 -0700 Subject: Problem pquest SNF 2009-06-13 11:09:34: RFOUT Message-ID: Archived From mihuhou at snf.stanford.edu Wed Jun 17 19:55:21 2009 From: mihuhou at snf.stanford.edu (mihuhou at snf.stanford.edu) Date: Wed, 17 Jun 2009 19:55:21 -0700 Subject: Problem pquest SNF 2009-06-17 19:55:20: RFOUT Message-ID: I tried RF=50W, 30W, 6W, with thick wafer, thin wafer and no wafer. RF was always out. From eenriquez at snf.stanford.edu Thu Jun 18 10:19:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Jun 2009 10:19:04 -0700 Subject: Comment pquest SNF 2009-06-18 10:19:03: Update rf out Message-ID: RF out fault is caused by the reflected power being out of tolerance. Next time this occurs, try tuning the rf in manual mode. From eenriquez at snf.stanford.edu Thu Jun 18 10:19:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Jun 2009 10:19:48 -0700 Subject: Comment pquest SNF 2009-06-18 10:19:47: Heater update Message-ID: New heaters will be here on 6/24. From xhlim at snf.stanford.edu Thu Jun 18 10:34:41 2009 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Thu, 18 Jun 2009 10:34:41 -0700 Subject: Shutdown pquest SNF 2009-06-18 10:34:39: Wafer dropped into chamber while unloading Message-ID: From eenriquez at snf.stanford.edu Thu Jun 18 10:52:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Jun 2009 10:52:50 -0700 Subject: Shutdown pquest SNF 2009-06-18 10:52:50: Down for RF tuning Message-ID: From eenriquez at snf.stanford.edu Thu Jun 18 15:14:08 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Jun 2009 15:14:08 -0700 Subject: Comment pquest SNF 2009-06-18 15:14:07: Update Message-ID: Recovered the user's wafer. Ran process 5X using different recipes. First wafer failed for no bias. The last 4 ran without any problems. They had the normal bias voltage and the rf matching ran in Auto. Purposely detuned the matching network several times and it automatically returned the match to minimum reflected power. Still trying to investigate the cause of the 1 failure. From mihuhou at snf.stanford.edu Fri Jun 19 11:30:17 2009 From: mihuhou at snf.stanford.edu (mihuhou at snf.stanford.edu) Date: Fri, 19 Jun 2009 11:30:17 -0700 Subject: Comment pquest SNF 2009-06-19 11:30:16: About RF tuning. Message-ID: Hi, eenriquez, Can you try Oxygen3.RCP and one of my recipes YC_10i9P or YC_10iEP? Maybe these have more chances of failure than others. Thanks a lot! Ying From eenriquez at snf.stanford.edu Fri Jun 19 14:29:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Jun 2009 14:29:30 -0700 Subject: Shutdown pquest SNF 2009-06-18 10:34:39: Wafer dropped into chamber while unloading Message-ID: Recovered the wafer. Cycled handling about 20X without any problems. From eenriquez at snf.stanford.edu Fri Jun 19 14:45:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Jun 2009 14:45:03 -0700 Subject: Shutdown pquest SNF 2009-06-18 10:52:50: Down for RF tuning Message-ID: Cycled various recipes about 20x with one rf failure. If the problem re-occurs, try unloading and reloading the wafer. Then restart the recipe. From eenriquez at snf.stanford.edu Fri Jun 19 14:45:14 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Jun 2009 14:45:14 -0700 Subject: Comment pquest SNF 2009-06-18 15:14:07: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 19 14:45:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Jun 2009 14:45:47 -0700 Subject: Comment pquest SNF 2009-06-19 11:30:16: About RF tuning. Message-ID: Archived From arkam at snf.stanford.edu Sat Jun 20 15:30:03 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sat, 20 Jun 2009 15:30:03 -0700 Subject: Problem pquest SNF 2009-06-20 15:30:03: with RF 50 watt, voltage is just -3 V for Oxygen. Generally I get 100 V Message-ID: From eenriquez at snf.stanford.edu Mon Jun 22 09:41:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Jun 2009 09:41:17 -0700 Subject: Shutdown pquest SNF 2009-06-22 09:41:16: No RF bias Message-ID: From eenriquez at snf.stanford.edu Mon Jun 22 15:20:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Jun 2009 15:20:39 -0700 Subject: Comment pquest SNF 2009-06-22 15:20:39: Update No RF bias Message-ID: Unable to generate any bias voltage this morning but after changing the recipe and manually tuning the matching network, now I can't make it fail. I suspect that there is a loose or defective component inside the matching network. I will keep the system on shutdown until I have a permanent fix. From cbaxter at snf.stanford.edu Mon Jun 22 21:21:28 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Jun 2009 21:21:28 -0700 Subject: Comment pquest SNF 2009-06-22 21:21:27: RF connection Message-ID: Inside the rf match, the rf copper strap is loose ( this was the same rf connection that tighten last time we an rf problem.). The rf match will need to come off from tool and tighten the connection. From eenriquez at snf.stanford.edu Tue Jun 23 14:32:56 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Jun 2009 14:32:56 -0700 Subject: Shutdown pquest SNF 2009-06-22 09:41:16: No RF bias Message-ID: Found the RF bias resistor connection inside the matching network was very loose. Retightened the connection. Cycled the RF on and off many times without a single fail. From eenriquez at snf.stanford.edu Tue Jun 23 14:33:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Jun 2009 14:33:04 -0700 Subject: Comment pquest SNF 2009-06-22 21:21:27: RF connection Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jun 23 14:33:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Jun 2009 14:33:15 -0700 Subject: Comment pquest SNF 2009-06-22 15:20:39: Update No RF bias Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jun 23 14:33:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Jun 2009 14:33:21 -0700 Subject: Problem pquest SNF 2009-06-20 15:30:03: with RF 50 watt, voltage is just -3 V for Oxygen. Generally I get 100 V Message-ID: Found the RF bias resistor connection inside the matching network was very loose. Retightened the connection. Cycled the RF on and off many times without a single fail. From eenriquez at snf.stanford.edu Wed Jun 24 08:08:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Jun 2009 08:08:29 -0700 Subject: Comment pquest SNF 2009-06-24 08:08:28: RF reliability check Message-ID: Cycled the RF 5X with no problems. From eenriquez at snf.stanford.edu Wed Jun 24 13:59:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Jun 2009 13:59:17 -0700 Subject: Comment pquest SNF 2009-06-18 10:19:47: Heater update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jun 24 14:00:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Jun 2009 14:00:35 -0700 Subject: Comment pquest SNF 2009-06-24 14:00:34: Heater update Message-ID: New heaters are here. Need to schedule installation