Comment pquest SNF 2009-05-28 20:35:08: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 1 12:37:09 PDT 2009


RF now working.  Ran O2 plasma.  He flow at 10T is 7.2 sccm.  Cycled wafer in out of the system several times.




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