Problem pquest SNF 2009-06-06 16:20:17: Waiting for clamp sensor for 30 mins

arkam at snf.stanford.edu arkam at snf.stanford.edu
Sat Jun 6 16:20:18 PDT 2009


I ran oxygen recipe first. Then I left the wafer in the chuck and tried to run my seasoning. BUt it is showing waiting for clamp sensor for 30 mins. Everything else is not responding. My wafer is inside. I am waiting to see if the other buttons start working or not.




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