Shutdown pquest SNF 2009-06-06 16:36:14: clamp down sensor

arkam at snf.stanford.edu arkam at snf.stanford.edu
Sat Jun 6 16:36:14 PDT 2009


Still waiting for clamp down sensor--the pressure is also slowly increasing. My wafer is inside. The whole machine is not responding. So I am shutting it down.




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