Shutdown pquest SNF 2009-06-09 22:34:54: wafer stuck
shuluc at snf.stanford.edu
shuluc at snf.stanford.edu
Tue Jun 9 22:34:55 PDT 2009
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Problem pquest SNF 2009-06-08 12:25:16: Variable air leak--only OK for O2 etching
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Shutdown pquest SNF 2009-06-09 22:34:54: wafer stuck
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Problem pquest SNF 2009-06-08 12:25:16: Variable air leak--only OK for O2 etching
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Shutdown pquest SNF 2009-06-09 22:34:54: wafer stuck
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