Problem pquest SNF 2009-06-14 11:15:14: RF out and He

arkam at snf.stanford.edu arkam at snf.stanford.edu
Sun Jun 14 11:15:15 PDT 2009


I also faced RFout problem. Helium without any wafer is 8.5 sccm and with wafer 7 sccm. This is higher than it should be




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