Problem pquest SNF 2009-06-14 11:15:14: RF out and He

arkam at arkam at
Sun Jun 14 11:15:15 PDT 2009

I also faced RFout problem. Helium without any wafer is 8.5 sccm and with wafer 7 sccm. This is higher than it should be

More information about the pquest-pcs mailing list