Comment pquest SNF 2009-06-18 15:14:07: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jun 18 15:14:08 PDT 2009


Recovered the user's wafer.  Ran process 5X using different recipes.  First wafer failed for no bias.  The last 4 ran without any problems.  They had the normal bias voltage and the rf matching ran in Auto.  Purposely detuned the matching network several times and it automatically returned the match to minimum reflected power.  Still trying to investigate the cause of the 1 failure.




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