Shutdown pquest SNF 2009-06-18 10:52:50: Down for RF tuning

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 19 14:45:03 PDT 2009


Cycled various recipes about 20x with one rf failure.  If the problem re-occurs, try unloading and reloading the wafer.  Then restart the recipe.




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