June 2009 Archives by date

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Starting: Mon Jun 1 12:36:39 PDT 2009
Ending: Wed Jun 24 14:00:35 PDT 2009
Messages: 71

Shutdown pquest SNF 2009-05-07 16:46:29: RF system still not working eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-29 14:59:50: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-28 20:35:08: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-28 19:41:04: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-28 14:34:23: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-26 18:21:06: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-26 15:01:42: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-26 12:18:16: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-20 21:17:02: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-15 15:07:33: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-14 19:31:01: Chuck assembly eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-13 18:17:39: Reassembly update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-12 14:49:48: Heater update eenriquez at snf.stanford.edu
Problem pquest SNF 2009-05-07 15:12:41: No bias voltage eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-07 15:13:11: No bias voltage eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-05 18:56:50: PQuest back up eenriquez at snf.stanford.edu
Comment pquest SNF 2009-05-01 19:45:35: Backside He leak creeping up eenriquez at snf.stanford.edu
Comment pquest SNF 2009-04-20 14:24:01: Completed wet clean eenriquez at snf.stanford.edu
Comment pquest SNF 2009-04-17 04:08:03: Regarding the broken wafer eenriquez at snf.stanford.edu
Shutdown pquest SNF 2009-06-03 14:42:55: Big Air leak jimkruger at snf.stanford.edu
Comment pquest SNF 2009-06-03 19:26:49: Chamber leak rate cbaxter at snf.stanford.edu
Shutdown pquest SNF 2009-06-03 14:42:55: Big Air leak eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-03 19:26:49: Chamber leak rate eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-06 16:20:17: Waiting for clamp sensor for 30 mins arkam at snf.stanford.edu
Shutdown pquest SNF 2009-06-06 16:36:14: clamp down sensor arkam at snf.stanford.edu
Shutdown pquest SNF 2009-06-06 16:36:14: clamp down sensor eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-06 16:20:17: Waiting for clamp sensor for 30 mins eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-08 12:25:16: Variable air leak--only OK for O2 etching jimkruger at snf.stanford.edu
Shutdown pquest SNF 2009-06-09 22:34:54: wafer stuck shuluc at snf.stanford.edu
Shutdown pquest SNF 2009-06-09 22:34:54: wafer stuck eenriquez at snf.stanford.edu
Shutdown pquest SNF 2009-06-10 18:28:45: Leaky feedthrough eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-11 15:05:47: Update feedthrough eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-11 16:42:47: Update cbaxter at snf.stanford.edu
Shutdown pquest SNF 2009-06-10 18:28:45: Leaky feedthrough cbaxter at snf.stanford.edu
Problem pquest SNF 2009-06-08 12:25:16: Variable air leak--only OK for O2 etching shott at snf.stanford.edu
Comment pquest SNF 2009-06-11 15:05:47: Update feedthrough shott at snf.stanford.edu
Comment pquest SNF 2009-06-11 16:42:47: Update shott at snf.stanford.edu
Problem pquest SNF 2009-06-13 11:09:34: RFOUT mihuhou at snf.stanford.edu
Comment pquest SNF 2009-06-13 20:32:29: Waiting for clampdown sensor sdogbe at snf.stanford.edu
Problem pquest SNF 2009-06-14 11:15:14: RF out and He arkam at snf.stanford.edu
Problem pquest SNF 2009-06-14 18:16:57: Update 6-14-09 jimkruger at snf.stanford.edu
Shutdown pquest SNF 2009-06-15 08:49:44: No RF eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-16 15:21:35: Update eenriquez at snf.stanford.edu
Shutdown pquest SNF 2009-06-15 08:49:44: No RF eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-16 15:21:35: Update eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-14 18:16:57: Update 6-14-09 eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-14 11:15:14: RF out and He eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-13 20:32:29: Waiting for clampdown sensor eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-13 11:09:34: RFOUT eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-17 19:55:20: RFOUT mihuhou at snf.stanford.edu
Comment pquest SNF 2009-06-18 10:19:03: Update rf out eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-18 10:19:47: Heater update eenriquez at snf.stanford.edu
Shutdown pquest SNF 2009-06-18 10:34:39: Wafer dropped into chamber while unloading xhlim at snf.stanford.edu
Shutdown pquest SNF 2009-06-18 10:52:50: Down for RF tuning eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-18 15:14:07: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-19 11:30:16: About RF tuning. mihuhou at snf.stanford.edu
Shutdown pquest SNF 2009-06-18 10:34:39: Wafer dropped into chamber while unloading eenriquez at snf.stanford.edu
Shutdown pquest SNF 2009-06-18 10:52:50: Down for RF tuning eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-18 15:14:07: Update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-19 11:30:16: About RF tuning. eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-20 15:30:03: with RF 50 watt, voltage is just -3 V for Oxygen. Generally I get 100 V arkam at snf.stanford.edu
Shutdown pquest SNF 2009-06-22 09:41:16: No RF bias eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-22 15:20:39: Update No RF bias eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-22 21:21:27: RF connection cbaxter at snf.stanford.edu
Shutdown pquest SNF 2009-06-22 09:41:16: No RF bias eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-22 21:21:27: RF connection eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-22 15:20:39: Update No RF bias eenriquez at snf.stanford.edu
Problem pquest SNF 2009-06-20 15:30:03: with RF 50 watt, voltage is just -3 V for Oxygen. Generally I get 100 V eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-24 08:08:28: RF reliability check eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-18 10:19:47: Heater update eenriquez at snf.stanford.edu
Comment pquest SNF 2009-06-24 14:00:34: Heater update eenriquez at snf.stanford.edu

Last message date: Wed Jun 24 14:00:35 PDT 2009
Archived on: Fri Jan 11 13:09:51 PST 2013

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