From eenriquez at snf.stanford.edu Tue Mar 3 10:46:14 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Mar 2009 10:46:14 -0800 Subject: Comment pquest SNF 2009-02-17 13:39:52: Completed wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 3 10:46:58 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Mar 2009 10:46:58 -0800 Subject: Comment pquest SNF 2009-03-03 10:46:57: Completed wet clean Message-ID: Did not replace the wafer clamp springs From arkam at snf.stanford.edu Wed Mar 4 11:12:07 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Wed, 4 Mar 2009 11:12:07 -0800 Subject: Shutdown pquest SNF 2009-03-04 11:12:06: RF interfering iwth He and Bias Message-ID: Bias is very low and He is very high From jimkruger at snf.stanford.edu Wed Mar 4 11:16:58 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 4 Mar 2009 11:16:58 -0800 Subject: Comment pquest SNF 2009-03-04 11:16:58: RF problem details Message-ID: Symptoms on PQ are crazy readings as soon as RF comes on. Temperature goes negative, Back side He goes to 24, RF voltage reads about half of expected. I suspect RF leakage, maybe a bad RF ground. jim K From cbaxter at snf.stanford.edu Wed Mar 4 17:37:01 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Mar 2009 17:37:01 -0800 Subject: Shutdown pquest SNF 2009-03-04 11:12:06: RF interfering iwth He and Bias Message-ID: Secured cover on bottom electrode and also reseated top lid cover. Ran O2 clean recipe for 10mins and rf noise encountered, pressure and temp are stable. From cbaxter at snf.stanford.edu Wed Mar 4 21:36:14 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Mar 2009 21:36:14 -0800 Subject: Comment pquest SNF 2009-03-04 11:16:58: RF problem details Message-ID: From pbarclay at snf.stanford.edu Fri Mar 6 12:36:50 2009 From: pbarclay at snf.stanford.edu (pbarclay at snf.stanford.edu) Date: Fri, 6 Mar 2009 12:36:50 -0800 Subject: Comment pquest SNF 2009-03-06 12:36:50: wafer loading problem Message-ID: Wafer loading failed in four out of four attempts. In one attempt the wafer was displaced from its initial position on the arm by 1cm. In other three attempts the wafer was not visibly displaced on the arm during the loading sequence. From pbarclay at snf.stanford.edu Fri Mar 6 12:37:15 2009 From: pbarclay at snf.stanford.edu (pbarclay at snf.stanford.edu) Date: Fri, 6 Mar 2009 12:37:15 -0800 Subject: Problem pquest SNF 2009-03-06 12:37:14: wafer loading Message-ID: Wafer loading failed in four out of four attempts. In one attempt the wafer was displaced from its initial position on the arm by 1cm. In other three attempts the wafer was not visibly displaced on the arm during the loading sequence. From eenriquez at snf.stanford.edu Fri Mar 6 14:42:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Mar 2009 14:42:04 -0800 Subject: Comment pquest SNF 2009-03-06 12:36:50: wafer loading problem Message-ID: Removed broken wafer from the chamber and cleaned the chuck. Loaded and unloaded a wafer with no problems. Jim K will test the system further. From eenriquez at snf.stanford.edu Fri Mar 6 14:42:13 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Mar 2009 14:42:13 -0800 Subject: Problem pquest SNF 2009-03-06 12:37:14: wafer loading Message-ID: Removed broken wafer from the chamber and cleaned the chuck. Loaded and unloaded a wafer with no problems. Jim K will test the system further. From jimkruger at snf.stanford.edu Fri Mar 6 16:31:06 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 6 Mar 2009 16:31:06 -0800 Subject: Comment pquest SNF 2009-03-06 16:31:06: PQuest looks good Message-ID: wafers loading OK. Leakup is down to 1.1 mTorr/ min, very good for just pumped down. Watch the Presuure zero drift for a day or 2. From arkam at snf.stanford.edu Sat Mar 7 20:15:32 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sat, 7 Mar 2009 20:15:32 -0800 Subject: Problem pquest SNF 2009-03-07 20:15:31: heater probably broken Message-ID: From eenriquez at snf.stanford.edu Mon Mar 9 12:03:00 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Mar 2009 12:03:00 -0700 Subject: Problem pquest SNF 2009-03-07 20:15:31: heater probably broken Message-ID: Replaced blown heater fuses. Found the water in the chiller was frozen. The temperature set point was at - 9 C. I set the temp to 18 C. From jimkruger at snf.stanford.edu Tue Mar 10 18:43:45 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 10 Mar 2009 18:43:45 -0700 Subject: Problem pquest SNF 2009-03-10 18:43:44: Heater not functioning again Message-ID: Fuses again? From cbaxter at snf.stanford.edu Tue Mar 10 21:00:25 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Mar 2009 21:00:25 -0700 Subject: Comment pquest SNF 2009-03-10 21:00:24: Heater Message-ID: I checked both fuse's on heater box and both are ok. Checked 208 ac input power (ok), had to stop troubleshooting user need to use the tool that don't require heating up the chuck. Possible bad heater element or ssr ? From eenriquez at snf.stanford.edu Wed Mar 18 10:00:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Mar 2009 10:00:34 -0700 Subject: Comment pquest SNF 2009-03-03 10:46:57: Completed wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 18 10:00:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Mar 2009 10:00:48 -0700 Subject: Comment pquest SNF 2009-03-06 16:31:06: PQuest looks good Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 18 10:01:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Mar 2009 10:01:16 -0700 Subject: Comment pquest SNF 2009-03-10 21:00:24: Heater Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 18 10:01:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Mar 2009 10:01:41 -0700 Subject: Comment pquest SNF 2009-03-18 10:01:41: Completed wet clean Message-ID: From eenriquez at snf.stanford.edu Wed Mar 18 10:05:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Mar 2009 10:05:38 -0700 Subject: Comment pquest SNF 2009-03-18 10:05:38: Heater update Message-ID: Heater elements are open. Will update on repair time after we locate replacement heaters. From eenriquez at snf.stanford.edu Mon Mar 30 11:18:25 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Mar 2009 11:18:25 -0700 Subject: Comment pquest SNF 2009-03-18 10:01:41: Completed wet clean Message-ID: Archived From eenriquez at snf.stanford.edu Mon Mar 30 11:18:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Mar 2009 11:18:48 -0700 Subject: Comment pquest SNF 2009-03-30 11:18:47: Completed wet clean Message-ID: