Shutdown pquest SNF 2009-03-04 11:12:06: RF interfering iwth He and Bias

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Mar 4 17:37:01 PST 2009


Secured cover on bottom electrode and also reseated
top lid cover. Ran O2 clean recipe for 10mins and rf noise
encountered, pressure and temp are stable.




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