Problem pquest SNF 2009-03-06 12:37:14: wafer loading

pbarclay at snf.stanford.edu pbarclay at snf.stanford.edu
Fri Mar 6 12:37:15 PST 2009


Wafer loading failed in four out of four attempts.  In one attempt the wafer was displaced from its initial position on the arm by 1cm.  In other three attempts the wafer was not visibly displaced on the arm during the loading sequence.




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