Problem pquest SNF 2009-03-06 12:37:14: wafer loading

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 6 14:42:13 PST 2009


Removed broken wafer from the chamber and cleaned the chuck.  Loaded and unloaded a wafer with no problems.  Jim K will test the system further.




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