Shutdown pquest SNF 2009-05-04 14:26:25: Clamp drive problem

eenriquez at eenriquez at
Tue May 5 14:58:10 PDT 2009

Reassembled the clamp drive and replaced the bearing.  Installed spacer on mounting bolts to improve the bearing plate to the ferrofluidic feedthrough alignment.  Adjusted the clamp up, middle and down position sensors.  Cycled wafers.  Now running an O2 plasma.  Jim K will unload the dummy wafer and put the system up.

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