Comment pquest SNF 2009-05-04 18:22:18: Bad Bearing

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue May 5 14:58:18 PDT 2009


Reassembled the clamp drive and replaced the bearing.  Installed spacer on mounting bolts to improve the bearing plate to the ferrofluidic feedthrough alignment.  Adjusted the clamp up, middle and down position sensors.  Cycled wafers.  Now running an O2 plasma.  Jim K will unload the dummy wafer and put the system up.




More information about the pquest-pcs mailing list