Comment pquest SNF 2009-05-05 18:56:50: PQuest back up

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Tue May 5 18:56:51 PDT 2009


Wafer lift repaired.  He leak back to 3.3.  Leak-up rate = 1.4 mTorr/min (best ever = 1.0, so not bad) 
"Oxygen3" still not as "green" as standard.
OK to use with care.
Remember, as always, to watch the pressure zero after a vent and clean.




More information about the pquest-pcs mailing list