Comment pquest SNF 2009-05-15 15:07:33: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri May 15 15:07:34 PDT 2009


Completed reassembly but the chuck is still shorting to ground (no bias voltage.  Also, the backside cooling He flow is too high.  At 10 Torr, the flow is about 11 sccm.




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