Comment pquest SNF 2009-05-29 14:59:50: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri May 29 14:59:50 PDT 2009


Leveled the pins and adjusted the height.  Have not tried to load a wafer in auto.
Ran the Oxygen recipe but it had  0 bias voltage. Found the dark space shield was shorted to the electrode.  Adjusted the shield.
Ran the Oxygen recipe again.  Now bias voltage = - 65 V.  Bias reading, rf forward and reflecting on the screen were stable.  The rf generator read-out, on the other hand, is flashing RF out.  Also, the backside He flow is around 10 sccm.




More information about the pquest-pcs mailing list