From eenriquez at snf.stanford.edu Mon Nov 2 13:33:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Nov 2009 13:33:48 -0800 Subject: Comment pquest SNF 2009-10-05 14:27:44: Wet clean completed Message-ID: Archive From eenriquez at snf.stanford.edu Mon Nov 2 13:34:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Nov 2009 13:34:04 -0800 Subject: Comment pquest SNF 2009-11-02 13:34:04: Wet clean completed Message-ID: From eenriquez at snf.stanford.edu Wed Nov 4 11:03:31 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Nov 2009 11:03:31 -0800 Subject: Comment pquest SNF 2009-11-04 11:03:31: Completed monthly PM Message-ID: From jimkruger at snf.stanford.edu Tue Nov 17 16:53:06 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 17 Nov 2009 16:53:06 -0800 Subject: Shutdown pquest SNF 2009-11-17 16:53:05: Wafer broken in system Message-ID: Chipped edge of 1st wafer by clamp, opposite major flat. ] Broke 2nd wafer in~ 1/2 (half came out) while testing for He blow-by. Sorry jim From eenriquez at snf.stanford.edu Wed Nov 18 11:57:42 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Nov 2009 11:57:42 -0800 Subject: Shutdown pquest SNF 2009-11-17 16:53:05: Wafer broken in system Message-ID: Cleaned the chamber. Adjusted the clamp leveling and reduced the clamping force. Ran Oxygen3 recipe and cycled wafers with no problems. Backside He flow is < 1.5 sccm. From jimkruger at snf.stanford.edu Fri Nov 20 15:33:54 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 20 Nov 2009 15:33:54 -0800 Subject: Shutdown pquest SNF 2009-11-20 15:33:52: Broken wafer in system Message-ID: seems to have broken upon clamping, got high He blowby. Sysyem clean, O2 last, OK to open From shott at snf.stanford.edu Fri Nov 20 17:58:44 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 20 Nov 2009 17:58:44 -0800 Subject: Shutdown pquest SNF 2009-11-20 15:33:52: Broken wafer in system Message-ID: Wafer cleared and chuck cleaned. Jim Kruger is checking that a wafer loads and that the process conditions look OK. John From jasonlin at snf.stanford.edu Wed Nov 25 00:06:12 2009 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 25 Nov 2009 00:06:12 -0800 Subject: Shutdown pquest SNF 2009-11-25 00:06:12: Wafer broke inside chamber Message-ID: Sorry! Not sure why it broke (seasoning with OXYGEN3 and conditioning with my recipe went fine--no broken wafers). Would appreciate any tips to avoid this in the future. From eenriquez at snf.stanford.edu Wed Nov 25 16:48:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Nov 2009 16:48:27 -0800 Subject: Shutdown pquest SNF 2009-11-25 00:06:12: Wafer broke inside chamber Message-ID: Cleaned the chamber. Reduced the clamping force again. Ran an O2 clean. He leak rate is < 1 sccm. From eenriquez at snf.stanford.edu Mon Nov 30 10:16:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Nov 2009 10:16:41 -0800 Subject: Comment pquest SNF 2009-11-04 11:03:31: Completed monthly PM Message-ID: Archived From eenriquez at snf.stanford.edu Mon Nov 30 10:16:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Nov 2009 10:16:47 -0800 Subject: Comment pquest SNF 2009-11-30 10:16:47: Completed monthly PM Message-ID: From eenriquez at snf.stanford.edu Mon Nov 30 10:17:02 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Nov 2009 10:17:02 -0800 Subject: Comment pquest SNF 2009-11-02 13:34:04: Wet clean completed Message-ID: archived