From arkam at snf.stanford.edu Sun Oct 4 17:00:49 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sun, 4 Oct 2009 17:00:49 -0700 Subject: Problem pquest SNF 2009-10-04 17:00:48: the wafer stuck inside: waiting for process chamber gate to close is taking long time Message-ID: From arkam at snf.stanford.edu Sun Oct 4 17:11:03 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sun, 4 Oct 2009 17:11:03 -0700 Subject: Shutdown pquest SNF 2009-10-04 17:11:02: Message-ID: From arkam at snf.stanford.edu Sun Oct 4 17:11:41 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Sun, 4 Oct 2009 17:11:41 -0700 Subject: Shutdown pquest SNF 2009-10-04 17:11:40: wafer stuck inside...the whole screen is frozen for 20 minutes---waiting for process chamber gate close Message-ID: From eenriquez at snf.stanford.edu Mon Oct 5 14:26:46 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:26:46 -0700 Subject: Shutdown pquest SNF 2009-10-04 17:11:40: wafer stuck inside...the whole screen is frozen for 20 minutes---waiting for process chamber gate close Message-ID: Wafer was not broken and was still on the pins. Aborted the sequence and reset the machine. Unloaded the user's wafer and placed it in his container. Vented the chamber to perform the bi-monthly wetclean. From eenriquez at snf.stanford.edu Mon Oct 5 14:26:59 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:26:59 -0700 Subject: Shutdown pquest SNF 2009-10-04 17:11:02: Message-ID: Wafer was not broken and was still on the pins. Aborted the sequence and reset the machine. Unloaded the user's wafer and placed it in his container. Vented the chamber to perform the bi-monthly wetclean. From eenriquez at snf.stanford.edu Mon Oct 5 14:27:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:27:04 -0700 Subject: Problem pquest SNF 2009-10-04 17:00:48: the wafer stuck inside: waiting for process chamber gate to close is taking long time Message-ID: Wafer was not broken and was still on the pins. Aborted the sequence and reset the machine. Unloaded the user's wafer and placed it in his container. Vented the chamber to perform the bi-monthly wetclean. From eenriquez at snf.stanford.edu Mon Oct 5 14:27:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:27:45 -0700 Subject: Comment pquest SNF 2009-10-05 14:27:44: Wet clean completed Message-ID: From eenriquez at snf.stanford.edu Mon Oct 5 14:27:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:27:52 -0700 Subject: Comment pquest SNF 2009-09-21 10:12:39: Wet clean completed Message-ID: Archived From jimkruger at snf.stanford.edu Wed Oct 21 16:16:28 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 21 Oct 2009 16:16:28 -0700 Subject: Shutdown pquest SNF 2009-10-21 16:16:28: Broken wafer in system Message-ID: Broken at unload, sayeed on chuck. Best He seal of today. From eenriquez at snf.stanford.edu Wed Oct 21 21:18:01 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Oct 2009 21:18:01 -0700 Subject: Shutdown pquest SNF 2009-10-21 16:16:28: Broken wafer in system Message-ID: Recovered broken wafer and cleaned the chuck. Cycled wafer and ran an O2 plasma. From krivoire at snf.stanford.edu Thu Oct 22 09:56:06 2009 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Thu, 22 Oct 2009 09:56:06 -0700 Subject: Problem pquest SNF 2009-10-22 09:56:06: alarm on process pump ready Message-ID: main screen shows an alarm for "process pump ready" is it okay to use? From eenriquez at snf.stanford.edu Thu Oct 22 10:20:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Oct 2009 10:20:35 -0700 Subject: Comment pquest SNF 2009-10-22 10:20:35: OK to use Message-ID: OK to use with the alarm "process pump not ready" From cbaxter at snf.stanford.edu Sun Oct 25 12:19:55 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 25 Oct 2009 12:19:55 -0700 Subject: Problem pquest SNF 2009-10-22 09:56:06: alarm on process pump ready Message-ID: Got the red alarmed to cleared by rebooting the tool. From jimkruger at snf.stanford.edu Thu Oct 29 15:32:49 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 29 Oct 2009 15:32:49 -0700 Subject: Shutdown pquest SNF 2009-10-29 15:32:49: Wafer broken in system Message-ID: wafer ran OK, good He. Wafer was broken by lift pins on unload, I suspect we have a wornout teflon clamp pad. This allows the metal clamp to pinch the wafer, starting a crack. From jimkruger at snf.stanford.edu Thu Oct 29 18:03:10 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 29 Oct 2009 18:03:10 -0700 Subject: Shutdown pquest SNF 2009-10-29 15:32:49: Wafer broken in system Message-ID: With Jim McVittie, removed broken wafer and cleaned. Could not reset "process pump alarm" but seems OK to use.