From eenriquez at snf.stanford.edu Wed Sep 2 11:13:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Sep 2009 11:13:32 -0700 Subject: Comment pquest SNF 2009-09-02 11:13:31: Upadate Message-ID: RF match controller will be here tomorrow. From eenriquez at snf.stanford.edu Wed Sep 2 16:54:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Sep 2009 16:54:55 -0700 Subject: Problem pquest SNF 2009-08-29 15:07:48: wafer not positioned in holder Message-ID: Improved the lift pin levelling (wafer lift arm). Cycled wafers with no problem. Helium cooling flow is ~ 1 sccm. From eenriquez at snf.stanford.edu Thu Sep 3 15:22:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Sep 2009 15:22:18 -0700 Subject: Comment pquest SNF 2009-09-03 15:22:17: Update match network Message-ID: Installed new matching network controller. Continuing to see the same problem where both the tune and match indicators are pegged to the left and the fail light turns on. Need to continue troubleshooting. From eenriquez at snf.stanford.edu Fri Sep 4 16:41:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Sep 2009 16:41:57 -0700 Subject: Comment pquest SNF 2009-09-04 16:41:56: Update Message-ID: Repaired and tested the matching network. Need to reassemble and install. System should be ready by Wed 9/9/09 From eenriquez at snf.stanford.edu Tue Sep 8 15:27:31 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Sep 2009 15:27:31 -0700 Subject: Comment pquest SNF 2009-09-08 15:27:29: Update Message-ID: Installed newly repaired matching network. It seems to function OK but the RF power is very low and there is no bias voltage. From eenriquez at snf.stanford.edu Tue Sep 8 15:27:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Sep 2009 15:27:47 -0700 Subject: Comment pquest SNF 2009-09-04 16:41:56: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 8 15:28:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Sep 2009 15:28:04 -0700 Subject: Comment pquest SNF 2009-09-03 15:22:17: Update match network Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 8 15:28:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Sep 2009 15:28:20 -0700 Subject: Comment pquest SNF 2009-09-02 11:13:31: Upadate Message-ID: Archived From eenriquez at snf.stanford.edu Tue Sep 8 15:28:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Sep 2009 15:28:33 -0700 Subject: Comment pquest SNF 2009-08-31 14:50:59: Defective matching network controller Message-ID: Archived From cbaxter at snf.stanford.edu Tue Sep 8 23:34:47 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 8 Sep 2009 23:34:47 -0700 Subject: Comment pquest SNF 2009-09-08 23:34:46: Update Message-ID: Got the new rf match controller to tuned at 100watts with 0 reflective and dc bias at -65v. Still need to check backside he leak. From eenriquez at snf.stanford.edu Wed Sep 9 09:43:07 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Sep 2009 09:43:07 -0700 Subject: Shutdown pquest SNF 2009-08-30 13:02:48: RF tuner failure Message-ID: Repaired the matching network. Ran Oxygen3 and Oxygen recipe with no problems. The He cooling flow ~ 1.0 sccm. The chuck temperature = 40 C. From eenriquez at snf.stanford.edu Wed Sep 9 09:43:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Sep 2009 09:43:17 -0700 Subject: Comment pquest SNF 2009-09-08 23:34:46: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 9 09:43:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Sep 2009 09:43:23 -0700 Subject: Comment pquest SNF 2009-09-08 15:27:29: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 9 09:43:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Sep 2009 09:43:34 -0700 Subject: Comment pquest SNF 2009-08-28 11:34:41: Ready7 for Jim Kruger usage .... Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 9 09:43:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Sep 2009 09:43:51 -0700 Subject: Comment pquest SNF 2009-07-27 13:54:51: PQuest "RF out" intermittant Message-ID: Archived From jimkruger at snf.stanford.edu Wed Sep 9 12:47:54 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 9 Sep 2009 12:47:54 -0700 Subject: Comment pquest SNF 2009-09-09 12:47:53: PQuest up, but: Message-ID: In Standby, foreline pressure reads high (about 150 mTorr) and as a result Turbo current is high also (4.1 Amps). This is OK except I am not sure why it changed. Leak up rate is 1.7 mTorr/minute, OK. Voltage vs RF power reads low (similar to last year's numbers). "Oxygen3", 700/100 watts, gives 64 volts. I think this means that the RF poweer to be used in your recipe must be deterimined again, check etch rate of your material and your etch mask befoer committing impoartant samples. Please communicate your results. He blow-by is OK, about 1 sccm at 10 Torr. Heater is fixed, so back to setting the chiller about 10 C below the desired temperature and the contoller to about the chuck temperature.. The system is "clean" so we are stating "Cl only week" today and hopefullyy back on the schedule: Clean 1st and 3rd Mondays of the mpnth, Cl only until Tuesday a week later. F and high temperaure etches alloowed until the next cleaning date. From krivoire at snf.stanford.edu Wed Sep 9 22:08:03 2009 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Wed, 9 Sep 2009 22:08:03 -0700 Subject: Comment pquest SNF 2009-09-09 22:08:03: comments Message-ID: Since there are no more log sheets, I will write a few comments from my session here. I had no trouble running GaAs etch, oxygen3, and oxygen, using Jim K's RF tuning presets. DC bias is slightly lower than a year ago for the same RF (and much lower than recently). He is very low (<1) From xhlim at snf.stanford.edu Thu Sep 10 11:10:29 2009 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Thu, 10 Sep 2009 11:10:29 -0700 Subject: Comment pquest SNF 2009-09-10 11:10:28: No more log sheets Message-ID: From leoyu at snf.stanford.edu Fri Sep 11 16:46:24 2009 From: leoyu at snf.stanford.edu (leoyu at snf.stanford.edu) Date: Fri, 11 Sep 2009 16:46:24 -0700 Subject: Shutdown pquest SNF 2009-09-11 16:46:23: Wafer broken Message-ID: Wafer broken inside the chamber when unloading the sample. Also, the load lock pressure does not go down low enough sometimes when loading. From eenriquez at snf.stanford.edu Mon Sep 14 14:25:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Sep 2009 14:25:54 -0700 Subject: Shutdown pquest SNF 2009-09-11 16:46:23: Wafer broken Message-ID: Vented the chamber and wiped down the electrode. No wafer piece found on the electrode. Loaded and unloaded wafer many times with no problems. Ran 02 plasma for 30 minutes. Also drained and refilled the loadlock pump with oil. From jimkruger at snf.stanford.edu Mon Sep 14 17:17:19 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 14 Sep 2009 17:17:19 -0700 Subject: Shutdown pquest SNF 2009-09-14 17:17:19: Wafer fell off right front pin during unload-still in system Message-ID: From cbaxter at snf.stanford.edu Mon Sep 14 22:12:42 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 14 Sep 2009 22:12:42 -0700 Subject: Shutdown pquest SNF 2009-09-14 17:17:19: Wafer fell off right front pin during unload-still in system Message-ID: Recovered wafer from chamber. Checked and verfied wafer handoff, run 30mins o2 clean. From shott at snf.stanford.edu Tue Sep 15 13:23:06 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:23:06 -0700 Subject: Problem pquest SNF 2009-06-17 19:55:20: RFOUT Message-ID: RF problems have been resolved with replacment of matching network components. John From shott at snf.stanford.edu Tue Sep 15 13:23:11 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:23:11 -0700 Subject: Problem pquest SNF 2009-07-01 18:34:16: ECR power problem Message-ID: RF problems have been resolved with replacment of matching network components. John From shott at snf.stanford.edu Tue Sep 15 13:23:18 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:23:18 -0700 Subject: Comment pquest SNF 2009-07-02 11:13:36: Microwave pwr OK Message-ID: RF problems have been resolved with replacment of matching network components. John From shott at snf.stanford.edu Tue Sep 15 13:23:24 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:23:24 -0700 Subject: Problem pquest SNF 2009-07-18 14:52:15: RFout Message-ID: RF problems have been resolved with replacment of matching network components. John From shott at snf.stanford.edu Tue Sep 15 13:23:31 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:23:31 -0700 Subject: Problem pquest SNF 2009-07-19 07:00:03: DC bias 10 with 50 bias in Oxygen3 Message-ID: RF problems have been resolved with replacment of matching network components. John From shott at snf.stanford.edu Tue Sep 15 13:23:40 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:23:40 -0700 Subject: Problem pquest SNF 2009-07-25 12:02:19: RF OUT Message-ID: RF problems have been resolved with replacment of matching network components. John From shott at snf.stanford.edu Tue Sep 15 13:23:46 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:23:46 -0700 Subject: Comment pquest SNF 2009-07-25 15:04:10: RF OK after manual tuning. Message-ID: RF problems have been resolved with replacment of matching network components. John From shott at snf.stanford.edu Tue Sep 15 13:23:56 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:23:56 -0700 Subject: Comment pquest SNF 2009-09-09 12:47:53: PQuest up, but: Message-ID: From shott at snf.stanford.edu Tue Sep 15 13:25:47 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:25:47 -0700 Subject: Problem pquest SNF 2009-08-29 16:55:59: DC bias only half of its previous value Message-ID: The bias was higher during the period when there was no chuck heater installed. When the heater is installed, it appears as if some of the RF power is coupled into the heater leads instead of into the chuck itself. As a result, the lower bias values with the heater in place are likely the norm. John From shott at snf.stanford.edu Tue Sep 15 13:25:57 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:25:57 -0700 Subject: Comment pquest SNF 2009-09-09 22:08:03: comments Message-ID: From shott at snf.stanford.edu Tue Sep 15 13:26:02 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 15 Sep 2009 13:26:02 -0700 Subject: Comment pquest SNF 2009-09-10 11:10:28: No more log sheets Message-ID: From mihuhou at snf.stanford.edu Wed Sep 16 18:16:23 2009 From: mihuhou at snf.stanford.edu (mihuhou at snf.stanford.edu) Date: Wed, 16 Sep 2009 18:16:23 -0700 Subject: Problem pquest SNF 2009-09-16 18:16:21: Wafer broken Message-ID: Wafer found broken after unloading. Two small pieces of wafer chips on the edge of the chuck inside the chamber. From mihuhou at snf.stanford.edu Wed Sep 16 20:13:35 2009 From: mihuhou at snf.stanford.edu (mihuhou at snf.stanford.edu) Date: Wed, 16 Sep 2009 20:13:35 -0700 Subject: Shutdown pquest SNF 2009-09-16 20:13:35: Message-ID: From eenriquez at snf.stanford.edu Thu Sep 17 14:11:43 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Sep 2009 14:11:43 -0700 Subject: Shutdown pquest SNF 2009-09-16 20:13:35: Message-ID: Removed broken wafer pieces and wiped down the electrode. Adjusted the clamp down sensor to reduce the clamping force. Cycled wafer in and out several times. From eenriquez at snf.stanford.edu Thu Sep 17 14:11:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Sep 2009 14:11:49 -0700 Subject: Problem pquest SNF 2009-09-16 18:16:21: Wafer broken Message-ID: Removed broken wafer pieces and wiped down the electrode. Adjusted the clamp down sensor to reduce the clamping force. Cycled wafer in and out several times. From jimkruger at snf.stanford.edu Thu Sep 17 17:46:21 2009 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 17 Sep 2009 17:46:21 -0700 Subject: Shutdown pquest SNF 2009-09-17 17:46:21: Dropped wafer on unload Message-ID: Fell off right front lift pin. Wafer not broken, I stopped it in time. System is "clean, I had run O2 last so OK to vent without more plasma cleaning. Please save the wafer. jim From mdickey at snf.stanford.edu Fri Sep 18 10:16:52 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 18 Sep 2009 10:16:52 -0700 Subject: Shutdown pquest SNF 2009-09-17 17:46:21: Dropped wafer on unload Message-ID: Recovered wafer and Jim is cycling wafers From arkam at snf.stanford.edu Fri Sep 18 18:24:47 2009 From: arkam at snf.stanford.edu (arkam at snf.stanford.edu) Date: Fri, 18 Sep 2009 18:24:47 -0700 Subject: Shutdown pquest SNF 2009-09-18 18:24:46: wafer broken inside Message-ID: From cbaxter at snf.stanford.edu Fri Sep 18 20:53:06 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 18 Sep 2009 20:53:06 -0700 Subject: Shutdown pquest SNF 2009-09-18 18:24:46: wafer broken inside Message-ID: Vented chamber and vacuumed broken wafer chips. Run 30mins o2 clean. From shott at snf.stanford.edu Sat Sep 19 06:54:42 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 Sep 2009 06:54:42 -0700 Subject: Problem pquest SNF 2009-03-10 18:43:44: Heater not functioning again Message-ID: Heaters fixed some time ago by Elmer. Clearing this this ... John From shott at snf.stanford.edu Sat Sep 19 06:54:50 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 Sep 2009 06:54:50 -0700 Subject: Comment pquest SNF 2009-04-03 13:50:57: Heater update Message-ID: Heaters fixed some time ago by Elmer. Clearing this this ... John From shott at snf.stanford.edu Sat Sep 19 06:54:59 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 Sep 2009 06:54:59 -0700 Subject: Problem pquest SNF 2009-04-09 17:30:33: heater Message-ID: Heaters fixed some time ago by Elmer. Clearing this this ... John From eenriquez at snf.stanford.edu Mon Sep 21 10:12:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Sep 2009 10:12:40 -0700 Subject: Comment pquest SNF 2009-09-21 10:12:39: Wet clean completed Message-ID: From krivoire at snf.stanford.edu Thu Sep 24 11:11:30 2009 From: krivoire at snf.stanford.edu (krivoire at snf.stanford.edu) Date: Thu, 24 Sep 2009 11:11:30 -0700 Subject: Shutdown pquest SNF 2009-09-24 11:11:29: broken wafer Message-ID: wafer broke while being lifted onto pins for unload. From eenriquez at snf.stanford.edu Fri Sep 25 13:52:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Sep 2009 13:52:38 -0700 Subject: Shutdown pquest SNF 2009-09-24 11:11:29: broken wafer Message-ID: Removed broken wafer and wet cleaned the electrode. Found one of the wafer pins had rotated about 30 deg. Realigned the pin and secured the clamping mechanism. Cycled wafer many times without a problem. Ran the O3 recipe, He leak is abut 1 sccm