Problem pquest SNF 2009-08-29 15:07:48: wafer not positioned in holder

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 2 16:54:55 PDT 2009


Improved the lift pin levelling (wafer lift arm).  Cycled wafers with no problem.  Helium cooling flow is ~ 1 sccm.




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