Shutdown pquest SNF 2009-08-30 13:02:48: RF tuner failure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Sep 9 09:43:07 PDT 2009


Repaired the matching network. Ran Oxygen3 and Oxygen recipe with no problems.  The He cooling flow ~ 1.0 sccm.  The chuck temperature = 40 C.




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