Comment pquest SNF 2009-09-09 22:08:03: comments

krivoire at snf.stanford.edu krivoire at snf.stanford.edu
Wed Sep 9 22:08:03 PDT 2009


Since there are no more log sheets, I will write a few comments from my session here. I had no trouble running GaAs etch, oxygen3, and oxygen, using Jim K's RF tuning presets. DC bias is slightly lower than a year ago for the same RF (and much lower than recently).  He is very low (<1)




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