Shutdown pquest SNF 2009-09-11 16:46:23: Wafer broken

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 14 14:25:54 PDT 2009


Vented the chamber and wiped down the electrode.  No wafer piece found on the electrode.  Loaded and unloaded wafer many times with no problems.  Ran 02 plasma for 30 minutes.
Also drained and refilled the loadlock pump with oil.




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