Shutdown pquest SNF 2009-09-14 17:17:19: Wafer fell off right front pin during unload-still in system

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Sep 14 22:12:42 PDT 2009


Recovered wafer from chamber. Checked and verfied wafer
handoff, run 30mins o2 clean.




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