Problem pquest SNF 2009-08-29 16:55:59: DC bias only half of its previous value

shott at shott at
Tue Sep 15 13:25:47 PDT 2009

The bias was higher during the period when there was no chuck heater installed.  When the heater is installed, it appears as if some of the RF power is coupled into the heater leads instead of into the chuck itself.
As a result, the lower bias values with the heater in place are likely the norm.

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