Shutdown pquest SNF 2009-09-17 17:46:21: Dropped wafer on unload
jimkruger at snf.stanford.edu
jimkruger at snf.stanford.edu
Thu Sep 17 17:46:21 PDT 2009
Fell off right front lift pin. Wafer not broken, I stopped it in time.
System is "clean, I had run O2 last so OK to vent without more plasma cleaning. Please save the wafer.
jim
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