Shutdown pquest SNF 2009-09-17 17:46:21: Dropped wafer on unload

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Thu Sep 17 17:46:21 PDT 2009


Fell off right front lift  pin.  Wafer not broken, I stopped it in time.
System is "clean, I had run O2 last so OK to vent without more plasma cleaning.  Please save the wafer.
jim




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