Shutdown pquest SNF 2009-09-24 11:11:29: broken wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Sep 25 13:52:38 PDT 2009


Removed broken wafer and wet cleaned the electrode.
Found one of the wafer pins had rotated about 30 deg.  Realigned the pin and secured the clamping mechanism.  Cycled wafer many times without a problem.  Ran the O3 recipe, He leak is abut 1 sccm




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